毕业于东南大学，并攻读硕士博士，于2005年-2007年在日本名古屋大学微纳系统工程系从事博士后工作，现为东南大学机械工程学院教授、博士生导师。

   入选江苏省“333”人才，在江苏省微纳医疗器械设计与制造重点实验室从事MEMS/NEMS微纳结构设计与工艺、智能装备设计制造及自动化、精密加工方面的研究工作。目前主持承担了多项国家级、省级及企业科研项目。在束流微纳米结构加工方法，MEMS工艺模型和复杂仿真算法，精密成形工艺及装备、先进制造技术方向取得研究进展。

1989年－1993年，东南大学，机械工程学院，本科/学士

1993年－1996年，东南大学，机械工程学院，研究生/硕士

1998年－2002年，东南大学，机械工程学院，研究生/博士

2010年－现在，东南大学 教授、博士生导师

2005年－2007年，日本 名古屋大学(Nagoya University)微纳系统工程系 博士后研究

1996年－2009年，东南大学 副教授、讲师、助教、硕士生导师

2000年－2000年, 加拿大 Concordia大学访问学者

本科生基础课“算法语言与程序设计 C++”

研究生学位课“智能制造系统”

IEEE Journal Of MicroelectromechanicalSystem (JMEMS);

Sensors and Actuators

ACS Applied Materials & Interfaces

全国自动化系统与集成标准化技术（工业数据）委员会委员

中国机械工程学会生产工程分会模具专业委员会委员

江苏省“333”高层次人才培养工程

江苏省“六大人才高峰”高层次人才

江苏省科技进步奖一等奖（7）

江苏省科技进步奖二等奖（3）

东南大学教学工作优秀一等奖

江苏省教学成果一等奖 （8）

2015-2020年以来发表期刊论文

[1] Yan Xing*, Jin Qian, Miguel A.Gosálvez, Jie Zhang, Yunze Zhang. Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching. Microelectronic Engineering. 2020, 111375  231(15) July 2020; 

[2] Wu, Guorong; Xing, Yan*. The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism. IEEE Journal of Microelectromechanical Systems. 2020 29(5),  1234 -1244;

[3] Chai Qing, Chen Fang, Junyang Hu Yan Xing*, Dongliang Huang.  Cellular Automaton Model for The Simulation of Laser Cladding Profile of Metal Alloys. Materials & Design. 2020, 195;

[4] Chen Fang, Yan Xing,∗, Zaifa Zhou, Qing Chai, Qianhuang Chen. Structural characterization and continuous cellular automata simulation of micro structures by focused Ga ion beam induceddeposition process. Sensors and Actuators A 312 1  (2020) 112150;   

[5] Qianhuang Chen , Tianyang Shao and Yan Xing*. An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process. Sensors. 2020, 20(8):2306

[6] Huachen Peng, Penghao Dong, Xianqiang Cheng, Chen Zhang, Wencheng Tang *, Yan Xing *, Xin Zhou. Semi-Empirical Prediction of Residual Stress Distributions Introduced by Turning Inconel 718 Alloy Based on Lorentz Function. Materials  2020, 13(19), 4341;

[7] Qiu Xiaoli; Cheng Xianqiang; Dong Penghao; Peng Huachen; Xing Yan; Zhou Xin. Sensitivity Analysis of Johnson-Cook Material Constants and Friction Coefficient Influence on Finite Element Simulation of Turning Inconel 718. Materials 2019; 12(19);

[8] Veerla Swarnalatha, Prem Pal, Ashok Kumar Pandey, Avvaru Venkata Narasimha Rao, Yan Xing, Hiroshi Tanaka, Kazuo Sato. Systematic study of the etching characteristics of Si{111} in modified TMAH. : Volume 15, Issue 1, 15 January 2020, p. 52 – 57 Micro & Nano Letters.

[9] Penghao Dong , Huachen Peng, Xianqiang Cheng, Yan Xing*. Semi-Empirical Prediction of Residual Stress Profiles in Machining IN718 Alloy Using Bimodal Gaussian Curve  Materials 2019, 12, 3864. 

[10] Chen Fang, Qing Chai , Qianhuang Chen and Yan Xing*. Continuous Cellular Automaton Simulation of Focused Ion Beam-induced Deposition for Nano Structures. Nanotechnology. 2020 31 105301.

[11] Yan Xing, Zhiyue Guo, Miguel A. Gosálvez, Guorong Wu, Xiaoli Qiu. Characterization of anisotropic wet etching of single-crystal sapphire, Sensors and Actuators A 286 (2019) .

[12] Yuan Li, Yan Xing*, Chen Fang, Qianhuang Chen, Xiaoli Qiu. An experiment-based method for focused ion beam milling profile calculation and process design. Sensors and Actuators A 286 (2019) 78–90. 

[13] Pei Wang, Qianhuang Chen, Yan Xing(*), Yuan Li, Chen Fang, Xiaoli Qiu. Molecular dynamic simulation of orientation-dependent effect on silicon crystalline during sputtering process of focused ion beam. , Microsystem Technologies, 2019.25: 1413–1422.

[14] Yan Xing*, Miguel A. Gosálvez, Hui Zhang, Yuan Li, The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on AT and BT Cuts, IEEE/ASME Journal of Microelectromechanical Systems. 2018 , 27(4): 730-738.  

[15] Minghui Pan, Wencheng Tang, Yan Xing. Assembly sequence optimization for minimizing the riveting path and overall dimensional error. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2018, 232(14): 2065-2615.

[16] Ni, Jun; Tang, Wen Cheng, (*) Xing, Yan(*) Performance of reducing the dimensional error of an assembly by the rivet upsetting direction optimization. , proceedings of the institution of mechanical engineers part b-journal of engineering manufacture, 2017.10, 231(12): 2133~2144.   

[17] Yan Xing*, Miguel A. Gosálvez, Hui Zhang, Yuan Li, Xiaoli Qiu. Transient and Stable Profiles During Anisotropic Wet Etching of Quartz, IEEE Journal of Microelectromechanical Systems. 2017 ,26 (5) :1063-1072.

[18] Hui Zhang，Yuan Li，Miguel A. Gosalvez，Xiaoli Qiu，Yan Xing(*).  Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz. Sensors & Actuators: A. Physical，2017.02.02，256(1):24~34.

[19] Jun Ni, WC Tang, Y Xing, Kecun Ben, Ming Li. A local-to-global dimensional error calculation framework for the riveted assembly using finite element analysis. ASME Journal of Manufacturing Science and Engineering,  2015. 138(3) 031004.

[20] Zhuang Hui, Y Xing(*) , M A. Gosálvez, P. Pal, K. Sato. Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of siliconin alkaline etchants containing additives. Sensors and Actuators A: Physical .  2015. 233, (1) Pages 451–459. 

[21] Jun Ni, WC Tang, Y. Xing.  Assembly process optimization for reducing the dimensional error of antenna assembly with abundant rivets, Journal of Intelligent Manufacturing, 2015. 72(11) 1-14. 

[22] Yuan Li, M A. Gosálvez, Prem Pal, K. Sato Y Xing(*). Particle Swarm Optimization-based Continuous Cellular Automaton for the simulation of Deep Reactive Ion Etching Journal of Micromechanics and microengineering. , 2015. 25(5) 055023 SCI.    

[23] P Pal, A Ashok, Y Xing. Anisotropic Etching in Low Concentration KOH: Effects of Surfactant Concentration. Micro & Nano Letters. 2015. 

主要国际会议发表论文(IEEE MEMS conference, IEEE Transducers )

1]Wu, Guorong; Xing, Yan*; Fang, Chen; Yao, Jiabao; Lin, Xiaohui. Atomic Structure Method for the Calculation of Anisotropic Wet Etching Rate of Sapphire Crystal Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), v 2020-January, p 913-916.

[2]Shao, Tianyang; Chen, Qianhuang; Xing, Yan*; Lin, Xiaohui; Fang, Chen; Chai, Qing. An Experiment Based Damage Profile Function for Focused Helium Ion Beam Process in Fabrication of Micro/Nano Structures. Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), v 2020-January, p 905-908, MEMS 2020 EI

[3] Fang, Chen; Chen, Qianhuang ; Chai, Qing ; Xing, Yan*; Lin, Xiaohui. Continuous Cellular Automaton Simulation Model of Focused Ion Beam Induced Deposition Process for Micro/Nano Structures. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems  IEEE TRANSDUCERS 2019, p 1607-1610

[4] Xing, Yan*; Guo, Zhiyue; Wu, Guorong; Gosalvez, Miguel A. Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching. :019 20th International Conference on Solid-State Sensors, Actuators and Microsystems  IEEE TRANSDUCERS 2019, p 281-284.

[5] Zhang, Jie ; Xing, Yan* ; Gosalvez, Miguel A ; Qiu, Xiaoli ; Lin, Xiaohui; Zhang, Chibin. Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate.  Source: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2019), v 2019-January, p 361-364.

[6] Hui Zhang Jin Zhang; Yuan Li, Yan Xing (*) The microscopic activation energy etching mechanism in anisotropic wet etching of quartz, IEEE 31th International Conference on Micro Electro Mechanical Systems, Belfast, (IEEE MEMS 2018), Belfast, 2018.1.21-2018.1.27 

[7] Yuan Li ;  Hui Zhang; Xiaoli Qiu, Yan Xing* An experiment-based model for focused ion beam simulation and the process design optimization, IEEE 31th International Conference on Micro Electro Mechanical Systems Belfast, (IEEE MEMS 2018), Befast, 2018.1.21-2018.1.27

[8] Y Zhang，J Zhang，Y Xing*，H Zhang, M A Gosalvez. The level set simulation for complex microstructures in quartz wet etching . IEEE International Conference on Solid-state Sensors (IEEE Transducers 17), 2017 :1356-1359.

[9] H Zhang，Y Xing*，J Zhang，M A Gosálvez，Y Li. Evolutionary Kinetic Monte Carlo method for the simulation of anisotropic etching of Z-cut, at-cut and BT-cut quartz. IEEE International Conference on Solid-state Sensors (IEEE Transducers 17), 2017 :1308-1311

[10] X Yan*，Z Hui，PP Cai，L Yuan. The study of self-limited state profile and level set simulation of anisotropic wet etching on quartz.  IEEE 30th International Conference on Micro Electro Mechanical Systems Belfast, (IEEE MEMS 2017),